11:10 AM - 11:40 AM
[B302-3am-04] Novel optimization method with digital twin for SiC crystal growth system
Invited Lecture
[Lang.] Japanese
Keywords:Process Informatics, Crystal Growth, SiC, Digital Twin
Symposium
Co-Innovation Program (CIP) » Innovation of chemistry and materials science by digital transformation
Fri. Mar 25, 2022 9:00 AM - 11:40 AM B302 (Online Meeting)
Chair, Symposium organizer: Ryo Koga, CHIKYO Toyohiro, Tsuneo Kashiwagi, Hiroaki Iino
11:10 AM - 11:40 AM
[Lang.] Japanese
Keywords:Process Informatics, Crystal Growth, SiC, Digital Twin