9:00 AM - 9:30 AM
*Lawrence S Melvin1, Yudhishthir Kankel1, Zachary A Levinson1, Ulrich Welling1, Hironobu Taoka1, Hans-jurgen Stock1, Wolfgang Demmerle1 (1. Synopsys)
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Schedule
Session information
Computational / Analytical Approach for Lithography Processes
[A4] Computational / Analytical Approach for Lithography processes
Thu. Jun 30, 2022 9:00 AM - 11:30 AM Computational / Analytical Approach for Lithography Processes (A4)
Chairman:Tomoki Nagai(JSR Corporation), Takahiro Kozawa(Osaka University)
9:30 AM - 10:00 AM
*Takahiro Kozawa1 (1. Osaka University)
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Schedule
10:00 AM - 10:30 AM
*Momoji Kubo1 (1. Institute for Materials Research, Tohoku University)
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Schedule
10:30 AM - 11:00 AM
Kyohei Imai1, Bunta Inoue1, Yoshihiko Hirai1, *Masaaki Yasuda1 (1. Osaka Metropolitan University)
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Schedule
11:00 AM - 11:30 AM
*Kenji Yoshimoto1 (1. Toray Industries, Inc.)
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Schedule