The 39th International Conference of Photopolymer Science and Technology

Presentation information

Print

EUV Lithography

[2A505-07] EUV Lithography II

Wed. Jun 29, 2022 10:40 AM - 12:00 PM EUV Lithography (A5)

Chairman:Taku Hirayama(HOYA Corp.), Hiroaki Oizumi(GIGAPHOTON Inc.)

11:00 AM - 11:30 AM

[2A506] Recent status of the stochastic issues of photoresist materials in EUV lithography [Invited]

*Toru Fujimori1 (1. FUJIFILM Corporation)