Grazing Incident Resonant Soft X-ray Scattering for the Chemical Structure Size Distribution Analysis in EUV resist.

講演情報

EUV Lithography

2022年6月29日(水) 13:50 〜 16:00 EUV Lithography (A5)

Chairman:Hiroto Kudoh(Kansai University), Hiroaki Oizumi(GIGAPHOTON Inc.)

14:30 〜 14:50

*Atsunori Nakamoto¹, Shinji Yamakawa¹, Tetsuo Harada¹, Takeo Watanabe¹ (1. University of Hyogo)