The 39th International Conference of Photopolymer Science and Technology

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EUV Lithography

[2A508-13] EUV Lithography III

Wed. Jun 29, 2022 1:50 PM - 4:00 PM EUV Lithography (A5)

Chairman:Hiroto Kudoh(Kansai University), Hiroaki Oizumi(GIGAPHOTON Inc.)

2:50 PM - 3:20 PM

[2A511] Recent Research activity for EUV Lithography at QST [Invited]

*Hiroki YAMAMOTO Yamamoto1, Yuji Hosaka1, Kimio Yoshimura1, Masahiko Ishino1, Dinh Thanhhung1, Masaharu Nishikino1, Yasunari Maekawa1 (1. National Institutes for Quantum Science and Technology)