The 39th International Conference of Photopolymer Science and Technology

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EUV Lithography

[2A514-15] EUV Lithography IV

Wed. Jun 29, 2022 4:00 PM - 4:55 PM EUV Lithography (A5)

Chairman:Takeo Watanabe(University of Hyogo), Taku Hirayama(HOYA Corp.)

4:00 PM - 4:45 PM

[2A514] [Keynote Lecture] Patterning readiness towards High NA EUV lithography

*Danilo De Simone1 (1. IMEC, Belgium)