The 39th International Conference of Photopolymer Science and Technology

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EUV Lithography

[2A516-19] EUV Lithography V

Wed. Jun 29, 2022 4:55 PM - 6:45 PM EUV Lithography (A5)

Chairman:Hiroto Kudoh(Kansai University), Shinji Yamakawa(University of Hyogo)

5:25 PM - 5:55 PM

[2A517] Chemical mechanisms of metal-based EUV resists [Invited]

*Albert Manfred Brouwer1 (1. University of Amsterdam)