The 39th International Conference of Photopolymer Science and Technology

講演情報

印刷

EUV Lithography

[2A516-19] EUV Lithography V

2022年6月29日(水) 16:55 〜 18:45 EUV Lithography (A5)

Chairman:Hiroto Kudoh(Kansai University), Shinji Yamakawa(University of Hyogo)

17:25 〜 17:55

[2A517] Chemical mechanisms of metal-based EUV resists [Invited]

*Albert Manfred Brouwer1 (1. University of Amsterdam)