The 39th International Conference of Photopolymer Science and Technology

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Nanoimprint

[2A601-05] Nanoimprint I

Wed. Jun 29, 2022 1:00 PM - 2:40 PM Nanoimprint (A6)

Chairman:Yoshihiko Hirai(Osaka Metropolitan University), Hiroaki Kawata(Osaka Metropolitan University)

1:00 PM - 1:20 PM

[2A601] Nanoimprint with CO2 Ambient

*Toshiki ITO1, Isao KAWATA1, Yuto ITO1 (1. Canon Inc.)