[2A601-05] Nanoimprint I

[2A604] Using Machine Learning to Predict the Durability of a Mold for Producing Nanostructures in Ultraviolet Nanoimprint Lithography

Kazuki Okamoto¹, Tomohito Wakasa¹, Jun Taniguchi¹, *Shin-ichi Satake¹ (1. Tokyo University of Science)