The 39th International Conference of Photopolymer Science and Technology

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Nanoimprint

[2A606-10] Nanoimprint II

Wed. Jun 29, 2022 3:00 PM - 4:40 PM Nanoimprint (A6)

Chairman:Kazuma Kurihara(Advanced Industrial Science and Technology ), Jun Taniguchi(Tokyo University of Science)

3:20 PM - 3:40 PM

[2A607] Droplet-Dispensed Ultraviolet Nanoimprint Lithography in Mixed Condensable Gas of Trans-1,3,3,3-Tetrafluoropropene and Trans-1-Chloro-3,3,3-Trifluoropropene

*Kenta Suzuki1, Tatsuya Okawa1, Sung-Won Youn1 (1. National Institute of Advanced Industrial Science and Technology (AIST))