The 39th International Conference of Photopolymer Science and Technology

講演情報

印刷

Nanoimprint

[2A606-10] Nanoimprint II

2022年6月29日(水) 15:00 〜 16:40 Nanoimprint (A6)

Chairman:Kazuma Kurihara(Advanced Industrial Science and Technology ), Jun Taniguchi(Tokyo University of Science)

15:20 〜 15:40

[2A607] Droplet-Dispensed Ultraviolet Nanoimprint Lithography in Mixed Condensable Gas of Trans-1,3,3,3-Tetrafluoropropene and Trans-1-Chloro-3,3,3-Trifluoropropene

*Kenta Suzuki1, Tatsuya Okawa1, Sung-Won Youn1 (1. National Institute of Advanced Industrial Science and Technology (AIST))