[A14] 193nm Lithography Extension and EUV HVM Readiness

[3A1402] Evaluation of Surface-Enhanced Raman scattering substrate consisting of gold nanoparticles grown on nanoarrays of boehmite fabricated using magnetron sputtering process

*Taku Tanaka¹, Syunya Saegusa¹, Masayuki Naya^2,1, Takao Fukuoka^3,1, Yuichi Utsumi¹, Syo Amano¹, Akinobu Yamaguti¹ (1. Laboratory of Advanced Science and Technology for Industry, University of Hyogo,, 2. Keio University, 3. Kyoto University)