The 74th JSAP Autumn Meeting,2013

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07. Beam Technology and Nanofabrication » 7.2 Electron microscopes, evaluation, measurement and analysis

[16a-A13-1~10] 7.2 Electron microscopes, evaluation, measurement and analysis

Mon. Sep 16, 2013 9:15 AM - 12:00 PM A13 (TC1 3F-323)

10:45 AM - 11:00 AM

[16a-A13-6] Simulation of fogging electron trajectories in Scanning Electron Microscope

○(M1)SOSUKE HOSOI1, KENTARO KUMAGAI1, MASATOSHI KOTERA1 (Osaka Institute of Technology)

Keywords:電子ビーム　シミュレーション