The 74th JSAP Autumn Meeting,2013

Presentation information

Print

Oral presentation

07. Beam Technology and Nanofabrication » 7.2 Electron microscopes, evaluation, measurement and analysis

[16a-A13-1~10] 7.2 Electron microscopes, evaluation, measurement and analysis

Mon. Sep 16, 2013 9:15 AM - 12:00 PM A13 (TC1 3F-323)

11:00 AM - 11:15 AM

[16a-A13-7] Measurement of two-dimensional potential distribution at an insulator film on conductive substrate irradiated by electron beam

○(M1)Kentaro Kumagai1, Sosuke Hosoi1, Masaru Otani1, Masatoshi Kotera1 (Osaka Institute of Technology)

Keywords:電子ビーム,帯電