The 74th JSAP Autumn Meeting,2013

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Oral presentation

07. Beam Technology and Nanofabrication » 7.2 Electron microscopes, evaluation, measurement and analysis

[16a-A13-1~10] 7.2 Electron microscopes, evaluation, measurement and analysis

Mon. Sep 16, 2013 9:15 AM - 12:00 PM A13 (TC1 3F-323)

11:15 AM - 11:30 AM

[16a-A13-8] The drift reduction of Gallium Nitride layer SEM-EBSD mapping with Ion Liquid

○Hirobumi Morita1, Takashi Egawa1, Kazutaka Nimura2 (Nagoya Institute of Technology1, Hitachi High-Technologies2)

Keywords:EBSD,Ion Liquid,Image Drift