[16a-A13-1~10] 7.2 Electron microscopes, evaluation, measurement and analysis

[16a-A13-9] The drift reduction of Gallium Nitride layer SEM-EBSD mapping by Focused Ion Beam and carbon deposition

^○Hirobumi Morita¹, Takashi Egawa¹, Hideki Hirota², Kazutaka Nimura² (Nagoya Institute of Technology¹, Hitachi High-Technologies²)

Keywords:EBSD,FIB,Micro-sampling