[16p-A13-1~14] 7.3 Lithography

[16p-A13-7] Active-Matrix nc-Si Electron Emitter Array for Massively Parallel Direct-Write EB System (III)

^○Naokatsu Ikegami¹, Akira Kojima², Takashi Yoshida³, Hideyuki Ohyi², Nobuyoshi Koshida¹, Masayoshi Esashi³ (Tokyo Univ. of Agri. & Tech¹, Crestec Corp², Tohoku Univ.³)

Keywords:超並列電子線描画　,ナノシリコン　,電子エミッタ