The 74th JSAP Autumn Meeting,2013

Presentation information

Oral presentation

15. Crystal Engineering » 15.8 Crystal evaluation, nanoimpurities and crystal defects

[16p-B2-1~14] 15.8 Crystal evaluation, nanoimpurities and crystal defects

Mon. Sep 16, 2013 1:30 PM - 5:15 PM B2 (TC2 1F-102)

2:30 PM - 2:45 PM

[16p-B2-5] Vacancies Evaluation of CZ silicon crystal by low temperature ultrasonic measurement and secondary defect measurement (2): Correlation of vacancy and BMD density.

kazuki Okabe1,2, Hiroyuki Saito2, Kazuhiko Kashima2, Hiroshi Kaneta1,3, Yoshihiko Saito4, Yuichi Nemoto1, Terutaka Goto1 (Niigata Univ.1, GWJ2, Kyushu Inst. of Tech.3, Toshiba4)

Keywords:CZシリコン,原子空孔,BMD