The 74th JSAP Autumn Meeting,2013

Presentation information

Print

Symposium

Symposium » Challenge of next generation surface control on thehigh end semiconductor device in the industry

[16p-C11-1~12] Challenge of next generation surface control on thehigh end semiconductor device in the industry

Mon. Sep 16, 2013 1:00 PM - 5:15 PM C11 (TC3 2F-210)

1:30 PM - 2:00 PM

[16p-C11-2] Cleaning Technology for Advanced Semiconductor Memory

○Yoshihiro Ogawa1 (Advanced Memory Development Center,Semiconductor&Storage Products Company1)

Keywords:洗浄,乾燥