[16p-C11-1~12] Challenge of next generation surface control on thehigh end semiconductor device in the industry

[16p-C11-3] Molecular Dynamics Analysis on the Liquid Infiltration into Nanoscale Slit (2nd Report: Effects of Residual Gas)

^○Yasutaka Yamaguchi¹, Satoshi Nakaoka¹, Masayuki Kawakami², Daisaku Yano², Koji Yamanaka² (Osaka Univ.¹, Organo Corp.²)

Keywords:molecular dynamics