[16p-P8-1~21] Joint session K

[16p-P8-2] Mechnism of low resistivity of Ga-doped ZnO films using DEZ solution by spray method

^○Akiko Ide¹, Akiko Mochihara¹, Kenji Yoshino¹, Minoru Oshima², Yujin Takemoto², Koji Toyota², Koichiro Inaba², Ken-ichi Haga², Toshio Naka², Kohichi Tokudome² (Univ. Miyazaki¹, Tosoh Finechem²)

Keywords:ZnO,透明導電膜,スプレー