The 74th JSAP Autumn Meeting,2013

Presentation information

Oral presentation

13. Semiconductors A (Silicon) » 13.3 Insulator technology

[17a-B5-1~10] 13.3 Insulator technology

Tue. Sep 17, 2013 9:15 AM - 12:00 PM B5 (TC2 2F-201)

10:45 AM - 11:00 AM

[17a-B5-6] Evaluation of Interface State Density of Strained-Si MOS Interfaces by Conductance Method

Weili Cai1, Mitsuru Takenaka1, Shinichi Takagi1 (The University of Tokyo1)

Keywords:conductance method