The 74th JSAP Autumn Meeting,2013

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Poster presentation

06. Thin Films and Surfaces » 6.2 Carbon-based thin films

[17a-P15-1~9] 6.2 Carbon-based thin films

Tue. Sep 17, 2013 9:30 AM - 11:30 AM P15 (Davis Memorial Auditorium)

9:30 AM - 11:30 AM

[17a-P15-6] Development of High-Quality Diamond Growth Process Using Microwave Plasma CVD Apparatus with Specific Metal Chamber in Shape

○Masakazu Miyata1, Osamu Maida1, Syouhei Nankou2, Toshimichi Ito1 (Graduate School of Engineering, Osaka Univ.1, Nisshin Inc.2)

Keywords:ダイヤモンド,作製プロセス