[17p-B3-1~17] 15.6 IV-group-based compounds

△ [17p-B3-6] Defects in HPSI 4H-SiC studied by alpha particles induced charge transient spectroscopy

^○(PC)Naoya Iwamoto¹, Natsuko Fujita¹, Takahiro Makino¹, Shinobu Onoda¹, Takeshi Ohshima¹ (JAEA¹)

Keywords:高純度半絶縁性炭化ケイ素,欠陥評価,アルファ粒子