4:00 PM - 4:15 PM
[17p-B4-10] [Young Scientist Oral Presentation Award Speech](15 min.) Effect of fluorine contents in gate insulators on a-InGaZnO thin film transistors
Keywords:酸化物半導体,薄膜トランジスタ,フッ素
Oral presentation
Joint session K » Joint session K
Tue. Sep 17, 2013 1:30 PM - 6:15 PM B4 (TC2 1F-106)
4:00 PM - 4:15 PM
Keywords:酸化物半導体,薄膜トランジスタ,フッ素