The 74th JSAP Autumn Meeting,2013

Presentation information

Oral presentation

Joint session K » Joint session K

[17p-B4-1~18] Joint session K

Tue. Sep 17, 2013 1:30 PM - 6:15 PM B4 (TC2 1F-106)

4:15 PM - 4:30 PM

[17p-B4-11] Fabrication of Thin Film Transistors of oxide semiconductor by using Microwave sintering

Hea Jeong Cheong1, Shintaro Ogura1, Heisuke Sakai1, Masayuki Haranaka1, Kazuhiko Takeuchi1, Ritsuko Nagahata1, Sei Uemura1, Nobuko Fukuda1 (National Institute of Advanced Industrial Science and Technology (AIST)1)

Keywords:酸化物,マイクロ波加熱