[17p-B4-1~18] Joint session K

[17p-B4-11] Fabrication of Thin Film Transistors of oxide semiconductor by using Microwave sintering

^○Hea Jeong Cheong¹, Shintaro Ogura¹, Heisuke Sakai¹, Masayuki Haranaka¹, Kazuhiko Takeuchi¹, Ritsuko Nagahata¹, Sei Uemura¹, Nobuko Fukuda¹ (National Institute of Advanced Industrial Science and Technology (AIST)¹)

Keywords:酸化物,マイクロ波加熱