The 74th JSAP Autumn Meeting,2013

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Oral presentation

Joint session K » Joint session K

[17p-B4-1~18] Joint session K

Tue. Sep 17, 2013 1:30 PM - 6:15 PM B4 (TC2 1F-106)

5:00 PM - 5:15 PM

[17p-B4-14] Dependency of process condition in IGZO TFT Reliability

○Ju Saka1, Lijin Shou1, Fumito Otake1, Akira Taki1, Masanori Shirai1, Tomiyuki Yukawa1, Masaki Takei1, Junya Kiyota1, Satoru Ishibashi1, Kazuya Saito1 (ULVAC Inc,1)

Keywords:IGZO,TFT,半導体