[17p-B4-1~18] Joint session K

[17p-B4-15] Scale Dependence of Heating and Degradation Phenomena for Oxide Thin-Film Transistor

^○Satoshi Urakawa¹, Shigekazu Tomai², Masashi Kasami², Koki Yano², Wang Dapeng³, Mamoru Furuta³, Masahiro Horita^1,4, Yasuaki Ishikawa^1,4, Yukiharu Uraoka^1,4 (NAIST¹, Idemitsu Co., Ltd², Kochi Univ. of Tech.³, CREST⁴)

Keywords:酸化物半導体,薄膜トランジスタ,発熱解析