[17p-B4-1~18] Joint session K

[17p-B4-18] High On/Off-ratio P-type Oxide-based FETs Integrated onto Cu-interconnects

^○Hiroshi Sunamura¹, Kishou Kaneko¹, Naoya Furutake¹, Shinobu Saito¹, Mitsuru Narihiro¹, Nobuyuki Ikarashi¹, Masami Hane¹, Yoshihiro Hayashi¹ (Renesas¹)

Keywords:BEOL-Tｒ,P型,Cu配線