The 74th JSAP Autumn Meeting,2013

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Oral presentation

Joint session K » Joint session K

[17p-B4-1~18] Joint session K

Tue. Sep 17, 2013 1:30 PM - 6:15 PM B4 (TC2 1F-106)

3:30 PM - 3:45 PM

△ [17p-B4-9] Point Defects in IGZO Thin Films Fabricated by a Screen Printing Method

○Takaaki Morimoto1, Ken-ichi Nomura2, Nobuko Fukuda2, Yoshimichi Ohki1 (Waseda Univ.1, FLEC, AIST2)

Keywords:IGZO,スクリーン印刷,欠陥