The 74th JSAP Autumn Meeting,2013

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Oral presentation

13. Semiconductors A (Silicon) » 13.3 Insulator technology

[17p-B5-1~21] 13.3 Insulator technology

Tue. Sep 17, 2013 1:00 PM - 6:30 PM B5 (TC2 2F-201)

2:15 PM - 2:30 PM

[17p-B5-6] Electrical properties of ultra thin polycrystalline HfO2 film with very small electrode area

○Yusuke Tomura1, Ryu Hasunuma1, Kikuo Yamabe1, Shinji Migita2 (University of Tsukuba1, AIST NRI2)

Keywords:HfO2