Dielectric Properties of Thick Polycrystalline HfO<sub>2</sub> films

Presentation information

Oral presentation

13. Semiconductors A (Silicon) » 13.3 Insulator technology

Tue. Sep 17, 2013 1:00 PM - 6:30 PM B5 (TC2 2F-201)

2:30 PM - 2:45 PM

^○Mariko Hayashi¹, Hisanori Momma¹, Ryu Hasunuma¹, Kikuo Yamabe¹ (Univ. of Tsukuba¹)

Keywords:HfO2,Thick