The 74th JSAP Autumn Meeting,2013

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Oral presentation

06. Thin Films and Surfaces » 6.2 Carbon-based thin films

[17p-D1-1~18] 6.2 Carbon-based thin films

Tue. Sep 17, 2013 1:30 PM - 6:45 PM D1 (MK 1F-101)

6:15 PM - 6:30 PM

[17p-D1-17] Formation of a-SiCx:H films in microwave discharge flow of Ar

○Motoki Kumakura1, Tsuneo Suzuki1, Hidetoshi Saitoh1, Haruhiko Ito1 (Nagaoka Univ. of Tech.1)

Keywords:プラズマCVD,アモルファス炭化ケイ素