The 74th JSAP Autumn Meeting,2013

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Oral presentation

06. Thin Films and Surfaces » 6.2 Carbon-based thin films

[17p-D1-1~18] 6.2 Carbon-based thin films

Tue. Sep 17, 2013 1:30 PM - 6:45 PM D1 (MK 1F-101)

6:30 PM - 6:45 PM

△ [17p-D1-18] Influence of substrate bias voltage on properties of Si and N co-doped DLC films

○Kouhei Magara1, Saori Okuno1, Yusuke Onishi1, Hideki Nakazawa1 (Hirosaki Univ.1)

Keywords:プラズマ化学気相成長