[18a-C1-1~5] 8.3 Plasma deposition of thin film and surface treatment

△ [18a-C1-4] Effect of boron doping on crystalline structures and electrical properties of amorphous carbon films grown by radical-injection plasma-enhanced chemical vapor deposition

^○Lingyun Jia¹, Jun Kuki¹, Leyong Yu¹, Hiroki Kondo¹, Kenji Ishikawa¹, Makoto Sekine¹, Masaru Hori¹ (Nagoya Univ¹)

Keywords:アモルファスカーボン,太陽電池