[18a-C2-1~8] 8.4 Plasma etching

[18a-C2-8] Surface loss probabilities of H and N atoms in H2 and N2 mixture gases

^○Toshiya Suzuki¹, Keigo Takeda¹, Hiroki Kondo¹, Kenji Ishikawa¹, Makoto Sekine¹, Hori Hori¹ (Nagoya Univ.¹)

Keywords:Radical denisity,Loss probabirity,Etching