Oral presentation
08. Plasma Electronics » 8.4 Plasma etching
Wed. Sep 18, 2013 9:30 AM - 11:45 AM C2 (TC3 1F-102)
△：Young Scientist Oral Presentation Award Applied
▲：English Presentation
▼：Both Award Applied and English Presentation
9:30 AM - 9:45 AM
○Toshio Hayashi1, Kenji Ishikawa1, Makoto Sekine1, Masaru Hori1 (Nagoya University1)
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9:45 AM - 10:00 AM
○Tomohiro Kubota1, Michio Sato2, Takuya Iwasaki3, Kohei Ono3, Seiji Samukawa1,4 (IFS, Tohoku Univ.1, Harada Corp.2, Mizuho I&R Inst.3, WPI-AIMR, Tohoku Univ.4)
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10:00 AM - 10:15 AM
Naoki Watanabe1, Shingo Ohtsuka1, Takuya Iwasaki1, Kohei Ono1, Yasuroh Iriye1, Shunsuke Mochizuki2, ○Tomohiro Kubota3, Seiji Samukawa3,4 (Mizuho I&R Inst.1, Numerical Systems2, IFS, Tohoku Univ.3, WPI-AIMR, Tohoku Univ.4)
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10:15 AM - 10:30 AM
○Satomi Tajima1, Toshio Hayashi1, Kenji Ishikawa1, Makoto Sekine1, Masaru Hori1 (Nagoya Univ.1)
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Break (10:30 AM - 10:45 AM)
10:45 AM - 11:00 AM
○(PC)Yudai Miyawaki1, Haoran Wang1, Yusuke Kondo1, Kenji Ishikawa1, Keigo Takeda1, Hiroki Kondo1, Makoto Sekine1, Masaru Hori1 (Nagoya Univ.1)
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11:00 AM - 11:15 AM
○(M2)Haoran Wang1, Kenji Ishikawa1, Hideo Horibe2, Keigo Takeda1, Hiroki Kondo1, Makoto Sekine1, Masaru Hori1 (Nagoya Univ.1, Kanazawa Inst. Technol.2)
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11:15 AM - 11:30 AM
○(D)Nobuya Nakazaki1, Yoshinori Takao1, Koji Eriguchi1, Kouichi Ono1 (Kyoto Univ.1)
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11:30 AM - 11:45 AM
○Toshiya Suzuki1, Keigo Takeda1, Hiroki Kondo1, Kenji Ishikawa1, Makoto Sekine1, Hori Hori1 (Nagoya Univ.1)
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