11:30 AM - 11:45 AM
[18a-C2-8] Surface loss probabilities of H and N atoms in H2 and N2 mixture gases
Keywords:Radical denisity,Loss probabirity,Etching
Oral presentation
08. Plasma Electronics » 8.4 Plasma etching
Wed. Sep 18, 2013 9:30 AM - 11:45 AM C2 (TC3 1F-102)
11:30 AM - 11:45 AM
Keywords:Radical denisity,Loss probabirity,Etching