The 74th JSAP Autumn Meeting,2013

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13. Semiconductors A (Silicon) » 13.2 Semiconductor surfaces

[18p-C1-1~13] 13.2 Semiconductor surfaces

Wed. Sep 18, 2013 1:00 PM - 4:30 PM C1 (TC3 1F-101)

1:30 PM - 1:45 PM

[18p-C1-3] Satellite spectra of Si wafers observed with EUPS using 255eV EUV light for excitation

Tomoaki Ishitsuka1, ○Toshihisa Tomie1 (AIST RIIF1)

Keywords:Siのサテライト構造,EUPS,255 eV　励起