3:45 PM - 4:15 PM
[18p-C5-4] High Density Production of Carbon Ions by High Power Impulse Magnetron Sputtering
Keywords:カーボンスパッタ,パルス放電,成膜プロセス
Presentation information
Symposium
Symposium planned by Program Committee » Possibilities of reactive deposition process by high power impulse magnetron sputtering
[18p-C5-1~8] Possibilities of reactive deposition process by high power impulse magnetron sputtering
Wed. Sep 18, 2013 2:00 PM - 6:15 PM C5 (TC3 1F-115)