The 74th JSAP Autumn Meeting,2013

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Poster presentation

13. Semiconductors A (Silicon) » 13.3 Insulator technology

[18p-P9-1~10] 13.3 Insulator technology

Wed. Sep 18, 2013 1:30 PM - 3:30 PM P9 (Davis Memorial Auditorium)

1:30 PM - 3:30 PM

[18p-P9-3] A Study on SiN Fabricated by ECR Sputtering on Si and Ge

○Shimpei Tachikawa1, Yuya Nakatani1, Yoshitaka Iwazaki1, Tomo Ueno1 (Tokyo Univ. of Agri. & Tech.1)

Keywords:SiN