[19a-C10-1~9] 13.4 Interconnection technology

[19a-C10-4] Investigation on Crystal Orientation Dependence of Corrosion of Copper Wire by Atomic Force Microscopy

^○Shoichiro Ogata¹, Naritaka Kobayashi¹, Chikako Takatoh², Shohei Shima², Akira Fukunaga², Hitoshi Asakawa³, Takeshi Fukuma^1,3,4 (Grad. school, Kanazawa Univ.¹, Ebara Corp.², Bio-AFM FRC., Kanazawa Univ.³, ACT-C/JST⁴)

Keywords:原子間力顕微鏡,腐食,結晶方位