The 74th JSAP Autumn Meeting,2013

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Poster presentation

13. Semiconductors A (Silicon) » 13.5 Si process technology

[19a-P5-1~14] 13.5 Si process technology

Thu. Sep 19, 2013 9:30 AM - 11:30 AM P5 (Davis Memorial Auditorium)

9:30 AM - 11:30 AM

▲ [19a-P5-12] Electrical Characteristics of Ge/Si Hetero-Junction Tunnel Field-Effect Transistors and their Post Annealing Effects

○(D)Minsoo Kim1, Yuki Wakabayashi1, Ryosho Nakane1, Masafumi Yokoyama1, Mitsuru Takenaka1, Shinichi Takagi1 (The Univ. of Tokyo1)

Keywords:TFET,Hetero-junction,MBE