The 74th JSAP Autumn Meeting,2013

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Poster presentation

13. Semiconductors A (Silicon) » 13.5 Si process technology

[19a-P5-1~14] 13.5 Si process technology

Thu. Sep 19, 2013 9:30 AM - 11:30 AM P5 (Davis Memorial Auditorium)

9:30 AM - 11:30 AM

[19a-P5-5] Relationship between Crystal Growth of Polycrystalline Si Film and Crystal Defect Density by Visible Laser Irradiation

○Naoya Kawamoto1, Kazuyuki Tadatomo1, Akira Heya2, Naoto Matsuo2 (Yamaguchi Univ.1, Univ. of Hyogo2)

Keywords:多結晶シリコン