Effect of laser-beam overlapping irradiation in DLB-CLC poly-Si crystallization

Presentation information

Poster presentation

13. Semiconductors A (Silicon) » 13.5 Si process technology

Thu. Sep 19, 2013 9:30 AM - 11:30 AM P5 (Davis Memorial Auditorium)

9:30 AM - 11:30 AM

^○Masayuki Yamano¹, Shin-Ichiro Kuroki¹, Tadashi Sato¹, Nobuhiro Hata², Koji Kotani³, Takamaro Kikkawa¹ (RNBS¹, AIST², Tohoku Univ.³)

Keywords:TFT,poly-Si,結晶化