The 74th JSAP Autumn Meeting,2013

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Oral presentation

13. Semiconductors A (Silicon) » 13.5 Si process technology

[19p-B4-1~21] 13.5 Si process technology

Thu. Sep 19, 2013 1:30 PM - 7:00 PM B4 (TC2 1F-106)

4:30 PM - 4:45 PM

[19p-B4-12] Local Area Transfer of Thermally Oxidized Silicon Films with Midair Cavity Using Meniscus Force

○Muneki Akazawa1, Kohei Sakaike1, Shogo Nakamura1, Takashi Fukunaga1, Shohei Hayashi1, Seiji Morisaki1, Seiichiro Hagashi1 (AdSM, Hiroshima Univ.1)

Keywords:転写,中空構造,メニスカス力