Low-Temperature Layer Transfer of Silicon Films with Midair Cavity Using Meniscus Force

Presentation information

Oral presentation

13. Semiconductors A (Silicon) » 13.5 Si process technology

Thu. Sep 19, 2013 1:30 PM - 7:00 PM B4 (TC2 1F-106)

4:15 PM - 4:30 PM

^○(DC)Kohei Sakaike¹, Shogo Nakamura¹, Muneki Akazawa¹, Takashi Fukunaga¹, Seiji Morisaki¹, Shohei Hayashi¹, Seiichiro Higashi¹ (Hiroshima Univ.¹)

Keywords:転写,フレキシブル,メニスカス力