The 74th JSAP Autumn Meeting,2013

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Oral presentation

13. Semiconductors A (Silicon) » 13.5 Si process technology

[19p-B4-1~21] 13.5 Si process technology

Thu. Sep 19, 2013 1:30 PM - 7:00 PM B4 (TC2 1F-106)

5:45 PM - 6:00 PM

[19p-B4-17] Effects of Sputtering Gas on Formation of Ultrathin PtHfSi Film

○Yasuhiko Yoshimrua1, Shun-ichiro Ohmi1 (Tokyo Institute of Technology1)

Keywords:スパッタ,Kr